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Application of laser ionization and electron ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with sih4-nh3 gas mixtures

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ucalgary_2008_eustergerling_brett david_636030.pdf (27.92 MB)

Date

2008

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Description

Bibliography: p. 168-174
Some pages are in colour.

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Citation

Eustergerling, B. D. (2008). Application of laser ionization and electron ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with sih4-nh3 gas mixtures (Master's thesis, University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca. doi:10.11575/PRISM/2010

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http://hdl.handle.net/1880/103011

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